UC Safe Work Practices for Cleanrooms and Shared Spaces
This webinar include the proceedings of an all-day seminar offered to clean room managers and EH&S specialists focused on cleanroom gas safety and an opportunity for attendees to share best practices, lessons learned and emergency responses. The seminar was supported by UCOP and presented at UC Irvine.
The first part of the seminar was a training course presented Eugene Ngai of Chemically Speaking, LLC. The course focused on common cleanroom gases (principally silane) and included discussion of the physical and chemical properties, how to inspect and use cylinders and regulators, the features of suitable gas storage cabinets and the required monitoring, what is the release behavior of these common gases, codes, regulations and standards, incidents and key learnings, and emergency response planning.
The second part of the seminar was a round table discussion amongst the cleanroom managers and EH&S specialists to share experiences and issues common to cleanroom management: training and documentation, user access, gas handling, waste management options, ventilation systems, etc.
Recommended for those working with silane and other air reactive gases. Also recommended for those engaged in micro/nanofabrication and cleanroom activities.